300mm Compatible Optical Aligner SAL30C1 Series
Alignment possible with minimized wafer damage using the Bernoulli method.
The SAL30C1 series optical aligner compatible with 300mm is designed for transporting wafers that require positioning within semiconductor manufacturing equipment and inspection devices. It achieves high-speed and high-precision centering and notching of silicon wafers, enabling alignment of thin wafers. It supports thin, warped, and film-coated wafers, but please inquire about work detection capabilities and positioning accuracy. Alignment is possible while minimizing wafer damage through the Bernoulli method. The control methods are RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.
- Company：ジェーイーエル
- Price：Other
